SPUTTERING DEVICE,申请号JP19850212976-传众专利搜索

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法人/股东/高管

发明名称	SPUTTERING DEVICE
摘要
申请公布号	JPS6274073(A)	申请公布日期	1987.04.04
申请号	JP19850212976	申请日期	1985.09.26
申请人	HITACHI LTD	发明人	SETOYAMA HIDETSUGU;ARIMATSU KEIJI;OSHITA YOICHI
分类号	C23C14/36;C23C14/34;C23C14/35;H01F41/18;H01J37/34	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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