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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPS6273707(A)
申请公布日期
1987.04.04
申请号
JP19850212433
申请日期
1985.09.27
申请人
HITACHI LTD
发明人
TANAKA MASAHIRO;AZUMA KAZUFUMI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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