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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPS6273754(A)
申请公布日期
1987.04.04
申请号
JP19850215331
申请日期
1985.09.27
申请人
NEC CORP
发明人
TSUCHIYA HISAYUKI
分类号
H01L21/822;G01R31/28;H01L21/66;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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