| 摘要 |
PURPOSE:To eliminate the problems of an increase in the resistance value of a transparent electrode and a decrease in a permeability by composing the electrode of an SnO2 film which contains specific amount of F to Sn and an SnO2 film which contains specific amount of at least one of Sb, P to Sn. CONSTITUTION:A transparent electrode 13 is formed directly above a soda lime glass substrate 11, and the electrode 13 is formed of an SnO2 film 13a which contains 1-4at.% of F to Sn and an SnO2 film 13 b which contains 1-3at.% of at least one of Sb, P to Sn. For example, raw solution in which ethyl alcohol, SnCI4, 5H2O and NH4F are dissolved in water and raw solution in which water, ethyl alcohol, SnCI4, 5H2O SiCI3 and HCI are dissolved are prepared. While a soda lime glass substrate 14 is heated, the former raw solution is sprayed to one side, and an SnO2 film 13a which contains F to Sn is provided. Then, the latter solution is sprayed from above the film 13, and an SnO2 film 13b which contains Sb to Sn is provided. |
