发明名称 AMORPHOUS SILICON THIN FILM FIELD EFFECT TRANSISTOR WITH LOWELECTROSTATIC CAPACITY
摘要 <p>An amorphous silicon thin film FET is doped and structured to be particularly useful for use in liquid crystal display circuits. In particular, critical FET dimensions are provided along with doping levels and locations which permit optimal reduction of source to gate capacitance, while at the same time, preventing the occurrence of large contact voltage drops. Critical dimensions include active channel length, source-gate overlap, and amorphous silicon thickness. A critical relationship is established amongst these parameters and amorphous silicon doping levels.</p>
申请公布号 JPS6273671(A) 申请公布日期 1987.04.04
申请号 JP19860180275 申请日期 1986.08.01
申请人 GENERAL ELECTRIC CO <GE> 发明人 UIRIAMU UEIDOMAN PAIPAA;JIYOOJI EDOWAADO POTSUSHIN
分类号 H01L29/78;G02F1/136;G02F1/1368;G09F9/35;H01L27/12;H01L29/417;H01L29/786 主分类号 H01L29/78
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