发明名称 |
EBULLIOMETRIC HOT SPOT DETECTOR |
摘要 |
An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature. |
申请公布号 |
PH20743(A) |
申请公布日期 |
1987.04.02 |
申请号 |
PH19120000282 |
申请日期 |
1982.12.01 |
申请人 |
ROBERT DEAN HANCOCK |
发明人 |
KENNETH F. HOLLMAN;ROBERT DEAN HANCOCK |
分类号 |
G01K11/02;F16J3/04;G01N25/08;G01N25/72;G01R31/26 |
主分类号 |
G01K11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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