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发明名称
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINER SCHWARZMATRIXSCHICHT
摘要
申请公布号
DE3534414(A1)
申请公布日期
1987.04.02
申请号
DE19853534414
申请日期
1985.09.27
申请人
STANDARD ELEKTRIK LORENZ AG
发明人
GERSTLE,VOLKER,DIPL.-ING.;MAUZ,GERHARD,ING.
分类号
G03F7/30;G03F7/00;G03F7/38;H01J9/227;(IPC1-7):H01J9/20
主分类号
G03F7/30
代理机构
代理人
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