发明名称 SCANNING DEFLECTION DEVICE FOR CHARGED PARTICLE BEAM
摘要 PURPOSE:To suppress the generation of scanning distortion in any frequencies by supplying correction signals to a deflection coil with regard to the operation of a frequency variable means. CONSTITUTION:The ON and OFF of switching elements 31 to 36 are controlled with regard to the operation of a frequency variable means 12. If a frequency selected by the frequency variable means 12 is low, all switching elements are set to the ON status. If the selected frequency is high, a set of the switching elements 31 and 33 or 32 and 34 are set to the OFF status and amplification is increased for the scanning signals and then the power components consumed in the generation of eddy current are excessively supplied to coils 1X and 1Y. In addition, the correction signals created by inversion circuits 15 and 16 are added to original scanning signals H and V and both are supplied to operation amplifiers 13 and 14 by the continuity of the switching elements 35 and 36.
申请公布号 JPS60115141(A) 申请公布日期 1985.06.21
申请号 JP19830223513 申请日期 1983.11.28
申请人 NIPPON DENSHI KK 发明人 IENAGA KATSUJI
分类号 H01J37/147;H01J37/28;H04N3/23 主分类号 H01J37/147
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