| 摘要 |
PURPOSE:To conduct and discharge liquid entering between a central hole and center boss to the rear side of a turn table and to make a stable spinner treatment by providing a groove communicating from the center boss of the table to the rear side of the table. CONSTITUTION:This invention relates to the spinner turn table for making treatment by rotation for coating of liquid, chemical reaction and drying, in which the groove 11a communicating with the side face of the center boss 14 of the turn table 11 and the front of the turn table 11 is formed and a through-hole 11b in a vertical direction is provided to the turn table 1. The groove end on the front of the turn table 11 and the through-hole 11b are communicated with each other. Then the liquid entering between the central hole of a material to be treated and the center boss is conducted and discharged to the rear side of the turn table by the effect of centrifugal force and air flow. The outflow of the contaminated liquid from the center onto the front of the material to be treated is thus obviated and the stable spinner treatment is made possible. |
