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发明名称
ELECTRON BEAM EXPOSURE SYSTEM AND APPARATUS FOR CARRYING OUT THE SAME
摘要
申请公布号
EP0030347(B1)
申请公布日期
1987.04.01
申请号
EP19800107513
申请日期
1980.12.02
申请人
FUJITSU LIMITED
发明人
YASUDA, HIROSHI
分类号
H01L21/027;H01J37/147;H01J37/153;H01J37/302;H01J37/304;(IPC1-7):H01J37/304
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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