| 摘要 |
PURPOSE:To secure the uniformity of the thickness of an organic resin layer without making its manufacturing process complicate, by previously providing a pattern with a single or plural layers out of thin films at a location which is a prescribed distance apart from an organic electricity insulating film pattern and performing a patterning process by spin coating the organic insulating film. CONSTITUTION:An electricity insulating layer is formed in such a way that a pattern is previously provided with a single or plural layers out of thin films at a location which is a prescribed distance apart from an organic electricity insulating film pattern and performing a patterning process by spin coating the organic insulating film. When, for example, a pattern 9 is previously provided and a magnetic pole, gap, inter-layer insulating film, and coil are patterned by forming high-permeability thin films 2 and 3, gap dielectric film 4, organic- resin made electricity insulating films 5 and 7, and conductive thin films 6 and 8, they are simultaneously subjected to the patterning and put upon another, and then, an organic resin film 10 is formed on them by means of a spin coater. Thereafter, pre-baking, exposure, development, and hard baking are successively performed and, as a result, a tapered patterning film 12 is obtained. |
