| 摘要 |
PURPOSE:To attain measurement of a table position with high accuracy by fixing a laser light reflector on a moving table through an elastic body. CONSTITUTION:A sample 3 is set up on the table 2 to be moved in one direction by a moving guide 1 and the light reflector 8 having a mirror body 7 is fixed on the table 2 with fixing plates 4, 6 through the elastic body 5. Since the light reflector 8 is elastically fixed through the elastic body 5 such as rubber, unnatural force is not applied to the light reflector 8, the surface of the mirror body 7 is not distorted. Consequently, highly accurate positioning measurement can be attained in a laser measuring system. |
