发明名称 |
Manufacturing method of carbon film and use thereof. |
摘要 |
<p>This invention relates to a manufacturing method of a carbon film on a member which slidably contacts with another member, and more particularly it relates to a method for forming a thin carbon layer by sputtering glass-like carbon which has a high durability and less friction resistance against another member with which the filmed member contacts.</p> |
申请公布号 |
EP0216079(A1) |
申请公布日期 |
1987.04.01 |
申请号 |
EP19860110505 |
申请日期 |
1986.07.30 |
申请人 |
KAO CORPORATION |
发明人 |
YAMAUCHI, MICHIHIDE;KISHINE, NOBUYUKI |
分类号 |
C23C14/06;G11B5/84 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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