| 发明名称 |
Position detecting device. |
| 摘要 |
<p>A position detecting device comprising a laser source (11), a light sensing device (15) and a transfer slit plate (13) having periodic slits, thereby to sense a fringe of a Fraunhofer diffraction image in order to detect the position of the angle of the transfer slit plate (13). </p> |
| 申请公布号 |
EP0216159(A2) |
申请公布日期 |
1987.04.01 |
| 申请号 |
EP19860111651 |
申请日期 |
1986.08.22 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OKUTANI, NORIO;UEDA, TOMIYASU;MARUO, TOMOHIRO |
| 分类号 |
G01D5/38 |
主分类号 |
G01D5/38 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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