发明名称 ELECTROCONDUCTIVE THIN FILM
摘要 This invention relates to an electroconductive thin film prepared by forming a polymerized thin film on a substrate in a vacuum reactor by the decomposition of a metal complex starting material by glow discharge, said metal complex having a ligand selected from the group consisting of acetylacetonate and at least partially fluorinated acetylacetonate.
申请公布号 GB2180546(A) 申请公布日期 1987.04.01
申请号 GB19860020603 申请日期 1986.08.26
申请人 * RICOH CO LTD 发明人 YOSHIHITO * OSADA
分类号 H01L51/05;C08F2/46;C08G79/00;H01B1/12;H01C7/00;H01C7/04;H01L21/205;H01L21/365;(IPC1-7):C08G79/00;C08G83/00;C08G85/00;C08F2/58 主分类号 H01L51/05
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