ETCHING METHOD FOR ALUMINUM FILM,申请号JP19850207978-传众专利搜索

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发明名称	ETCHING METHOD FOR ALUMINUM FILM
摘要
申请公布号	JPS6270585(A)	申请公布日期	1987.04.01
申请号	JP19850207978	申请日期	1985.09.20
申请人	UBE IND LTD	发明人	HIROSE ZENKO;YOKOYAMA ARATA
分类号	C23F4/00;C23F1/04;H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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