| 摘要 |
PURPOSE:To produce quartz glass tubes having uniform drying and high degree of circularity free from warpage, by standing vertically tubular gel at the center of a uniformly bored cylindrical tube and drying it. CONSTITUTION:A sol solution comprising an alkyl silicate and silica fine powder as main raw materials is fed to a hollow cylindrical container and gelatinized while being rotated around the shaft of the cylinder, to give the tubular gel 7. Then, the tubular gel 7 is vertically stood at the center of drying container 3 having the channels 5 and the hole 6 to discharge water and an alcohol in the gel on the bottom and the uniformly bored holes 4 on the side, the top of the tubular gel is held by the support 2 of the cover 1, the container is closed and the gel is dried. Consequently, high-purity, high-precision quartz glass tubes useful as furnace core tube for diffusion furnace for semiconductor, jacket tube for optical fiber etc., are obtained. |
