发明名称 |
UN METODO DE FABRICAR UN DISPOSITIVO SEMICONDUCTOR. |
摘要 |
A method of providing patterns of conductors on semiconductor device, in particular patterns which consist of layers of different materials. A metal auxiliary layer is used in which a negative reproduction of the desired pattern of conductors is provided. After providing the conductive layers necessary for the pattern, the excessive parts thereof are removed by the selective dissolution of the metal auxiliary layer. The method is of particular importance which patterns of conductors are used having one or more materials which cannot be etched or can be etched with difficulty only. |
申请公布号 |
ES414113(A1) |
申请公布日期 |
1976.02.01 |
申请号 |
ES19130004141 |
申请日期 |
1973.04.26 |
申请人 |
N. V. PHILIPS'GLOEILAMPENFABRIEKEN |
发明人 |
|
分类号 |
G09F9/00;G02F1/1345;G09F9/30;H01L21/00;H01L21/28;H01L21/48;H01L21/60;H01L21/768;H01L23/482;H01L23/498;H01L23/532;H01L29/41;H05K3/24;(IPC1-7):01L/ |
主分类号 |
G09F9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|