| 摘要 |
PURPOSE:To fix the relative position between a laser diode and a photodiode uniformly by a method wherein the photodiode is formed by introducing the second conductivity type impurity into the first conductivity type semiconductor substrate and the first conductivity type semiconductor substrate is utilized as a current passage of the laser diode. CONSTITUTION:As a photodiode 24 is formed at a predetermined position on a semiconductor substrate 21 and a laser diode 31 is also formed at a predetermined position on the semiconductor substrate 21, the relative position between the laser diode 31 and the photodiode 24 can be accurately determined. The photovoltage of the photodiode 24 can be kept constant strictly by providing the photodiode 24 on the light passage of a coherent light emitted from the laser diode 31. |
