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发明名称
PROCESSING OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS6269623(A)
申请公布日期
1987.03.30
申请号
JP19850210399
申请日期
1985.09.24
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
KOMODA TAKUYA
分类号
H01L21/302;H01L21/205;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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