| 摘要 |
PURPOSE:To prevent the invasion of contaminated air through a rack opening during the filter exchange operation by providing an expandable cover covering the opening of a filter accommodating rack in a filter unit catching device. CONSTITUTION:A lifting and lowering frame 20 is provided on a traveling truck 1 traveling on the surface of a filter accommodating rack 80, and a sidewise traveling frame 40 having a turning device is attached to the lifting and lowering frame 20. On the sidewise traveling frame 40 are provided filter unit catching devices 60 driven by a pair of sidewise traveling devices. Further, a cover 90 is provided and fixed to the lifting and lowering frame 20, and has at its forward end an opening 91 and is flexible in a direction rectangular to the traveling direction. Suckers 92 are attached to the periphery of the opening 91, and the cover 90 is pressed against a cover mounting metal fitting 81 by a cover keep metal fitting 93 attached to the filter unit catching device 60, and hermetically seals the opening by the operation of suckers 92. |
