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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPS6267170(A)
申请公布日期
1987.03.26
申请号
JP19850206316
申请日期
1985.09.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KUWATA JUN;FUJITA YOSUKE;TODA TAKAO;MATSUOKA TOMIZO;ABE ATSUSHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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