| 摘要 |
PURPOSE:To remove a deposit layer on the inner wall of a shroud without turning off a vacuum by providing a hammer for hammering the shroud provided in a vacuum vessel from the outside of the vacuum vessel and a bellows for vacuum-sealing the hammer. CONSTITUTION:One end of the hammer 11 is hit by hand, for example, to move the hammer 11 up and down as shown by the arrow A and the shroud 2 is hammered by the other end of the hammer to remove the deposit layer 6 stuck on the inner wall 22 of the shroud 2. Consequently, the deposit layer 6 stuck on the inner wall 22 of the shroud 2 is struck down from the inner wall 22. Since the shroud 2 is usually inclined or directed downward, the deposit layer 6 struck down is dropped from the shroud 2. Besides, an opening 14 for dropping the deposit layer 6, for example, can be provided, as required, at the lower part of the shroud 2. |
