| 摘要 |
PURPOSE:To easily remove the deposited layer on the inside wall of a cylindrical shroud by providing a driving mechanism which drives a frame-shaped separating plate in the axial direction of the shroud while the vacuum tightness between said separating plate and a vacuum vessel is maintained to the inside of the shroud. CONSTITUTION:The separating plate 7 is held deep in, for example, the shroud 2 so as not to obstruct the formation of an epitaxial layer on a substrate 3 during the formation of said layer on the substrate. A driving bar 11 is moved back and forth from the atm. side to slide the plate 7 in the stage of removing the deposited layer sticking on the inside wall of the shroud 2. The layer sticking to the wall 22 of the shroud 2 is thereby scraped from the wall 22 and is dropped down. As a result, the surface of the shroud 2 is exposed and the cryogenic adsorption effect is improved, by which the vacuum degree of a growing chamber 12 is improved. |
