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发明名称
DEVICE FOR INSPECTING EXTERNAL APPEARANCE OF WAFER
摘要
申请公布号
JPS6265432(A)
申请公布日期
1987.03.24
申请号
JP19850204481
申请日期
1985.09.18
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
MORISHIGE YOSHIO
分类号
H01L21/66;G01B11/00
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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