| 摘要 |
PURPOSE:To facilitate formation of polycrystallized regions and automated processes by applying laser beams uniformly by a method wherein conductive layers which facilitate maintaining contacts between adjacent optoelectric transducers are provided between transparent electrodes and a light transmitting insulating substrate at the positions to which the laser beams are applied. CONSTITUTION:Conductive layers 51-54 are formed on a glass substrate 1 with conductive paste by screen printing and a transparent electrode layer is evaporated on them. Transparent electrodes 21-24... are patterned by the application of YAG laser beams. Then an amorphous Si layer 3, which is composed of P-type, I-type and N-type layers, which are laminated in this order from the transparent electrode side, with the thickness of about 100Angstrom , about 0.5mum and about 500Angstrom respectively, is formed over the whole surface. The laser beams are applied to the parts of the amorphous Si layers 3 above the conductive layers 51-54 to polycrystallize the irradiated regions 61-64... along the thickness direction of the amorphous Si layer 3 without melting or vaporizing those regions by the heat. Then, if a metal layer, mostly made of Al, is formed, it is electrically connected to the transparent electrodes because the regions 61-64 have conductivity 1,000 times of that of the amorphous Si layer. Then, the laser beams are applied to the positions to the right side of the contact regions to form metal electrode patterns 41-44.... |
