| 摘要 |
PURPOSE:To simplify processes and facilitate automation by a method wherein, between the elements of a series connection type thin film solar battery, respective metal electrodes and transparent electrodes are connected by low resistance layers which are produced by applying laser beams to an amorphous semiconductor intermediate layer and patterning of the transparent electrodes is also performed by laser beam application. CONSTITUTION:After a transparent electrode layer 2 is formed on a glass substrate 1, laser beams 5 are applied to form separating parts 6 by which transparent electrodes 21-25 are patterned. An amorphous Si layer 3, which is composed of P-type, I-type and N-type layers, which are laminated in this order from the transparent electrode side, with the thicknesses of about 100Angstrom , about 0.5mum and about 500Angstrom respectively, is formed over the whole surface. The laser beams 5 are applied to the parts of the amorphous Si layer 3 above the right edges of the separating parts of the transparent electrodes 21-25 to polycrystallize the regions 7 of the amorphous Si layer 3 along the whole thickness direction without melting or vaporizing those regions by the heat. The resistivity of the polycrystallized regions becomes 10<-3>OMEGAcm which is much lower than the resistivity 10<10>OMEGAcm of the amorphous Si layer. Then, if a metal electrode layer 4, mostly made of Al, is formed, it is electrically connected to the transparent electrodes 22-25 by the regions 7. Then the laser beams 5 are applied to the positions on the right side of the regions 7 to form metal electrode patterns 41-45. |
