Torque tube digital differential pressure sensor

摘要

A digital differential pressure sensor with relatively low sensitivity to common mode line pressure errors. The sensor includes an airtight enclosure having a pair of pressure ports through which pressures are coupled to opposite sides of a pressure-sensing diaphragm, bellows, or Bourdon tube. The pressure-sensing elements generate torques which are transmitted by a shaft to stress-sensitive resonators which are isolated from the torque-producing elements by a sealed, flexible tube.