| 摘要 |
PCT No. PCT/JP83/00317 Sec. 371 Date May 23, 1984 Sec. 102(e) Date May 23, 1984 PCT Filed Sep. 26, 1983 PCT Pub. No. WO84/01219 PCT Pub. Date Mar. 29, 1984.An impression made in a specimen is imaged by a one-dimensional scanning image sensing device, and in the case of the impression being quadrangular pyramidal, a signal representing the length of its diagonal are generated from the image output, and in the case of the impression being spherical, a signal representing its diameter is generated from the image output. The scanning by the one-dimensional scanning image sensing device does not cover the area of the impression over the entire width thereof but instead the scanning is effected for a first region of a small width which, in the case of the impression being quadrangular pyramidal, contains its first diagonal and, in the case of the impression being sperical, contains its diameter in a first direction. Next, when the impression is quadrangular pyramidal, the scanning is performed for a second of a small width which contains a second diagonal of the impression, or third and fourth regions which contains two vertexes of the second diagonal of the impression and is parallel to the first region.
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