FORMATION OF GROOVE INTO SEMICONDUCTOR,申请号JP19850204224-传众专利搜索

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发明名称	FORMATION OF GROOVE INTO SEMICONDUCTOR
摘要
申请公布号	JPS6265332(A)	申请公布日期	1987.03.24
申请号	JP19850204224	申请日期	1985.09.18
申请人	HITACHI LTD	发明人	OTA MASATAKA
分类号	H01L21/76;H01L21/302;H01L21/3065	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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