| 摘要 |
Disclosed is a method for automatically controlling integrated circuits before their mounting, or similar objects. An image of the object to be studied is recorded by means of a microscope coupled to a TV camera, for example, and the image is compared with a prerecorded reference image, both images being recorded in the form of digital signals; a differential binary image is created by making an anomaly bit signal correspond to the pixels where there is no coincidence, whereafter the parameters (position, height, width, elongation, compactness) are analyzed for each defect comprised of a plurality of adjacent pixels corresponding to an anomaly signal for a possible discard decision. Arrangements are provided to make the system independent of defects which do not disturb the operation of the circuits.
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