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发明名称
FORMATION OF POLYCRYSTALLINE SILICON THIN FILM
摘要
申请公布号
JPS6263419(A)
申请公布日期
1987.03.20
申请号
JP19850203800
申请日期
1985.09.14
申请人
SHARP CORP
发明人
KUDO ATSUSHI;KOBA MASAYOSHI
分类号
H01L21/20;H01L21/203;H01L21/26;H01L21/84
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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