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发明名称
MAGNETIC ROD SUPPLYING UNIT
摘要
申请公布号
JPS5478972(A)
申请公布日期
1979.06.23
申请号
JP19770146047
申请日期
1977.12.07
申请人
HITACHI LTD
发明人
ARAI FUMIO
分类号
H01L23/08;H01L21/50;H01L21/60;H01L21/68
主分类号
H01L23/08
代理机构
代理人
主权项
地址
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