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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6262517(A)
申请公布日期
1987.03.19
申请号
JP19850202115
申请日期
1985.09.12
申请人
TOSHIBA CORP
发明人
NAGAKUBO YOSHIHIDE
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
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地址
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