Process for fabricating electrical plasma-polymeric multi-layer capacitors

摘要

In a process for fabricating electrical plasma-polymeric multi-layer capacitors, a polyphenylene sulphide (PPS) or polyether ether ketone (PEEK) substrate has alternately deposited thereon glow-discharge polymeric dielectric layers based on perfluorinated hydrocarbons and regenerable thin aluminium layers serving as electrodes. Prior to the deposition of the layers, the substrate is treated in a CF4 plasma.