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发明名称
X-RAY LITHOGRAPHY SYSTEM
摘要
申请公布号
GB2152682(B)
申请公布日期
1987.03.18
申请号
GB19840024769
申请日期
1984.10.01
申请人
THE * PERKIN ELMER CORPORATION
发明人
CARLO * LA FIANDRA
分类号
G03F7/20;H01L21/027;(IPC1-7):G03B27/02
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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