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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPS6261331(A)
申请公布日期
1987.03.18
申请号
JP19850199428
申请日期
1985.09.11
申请人
HITACHI LTD
发明人
FUKUYAMA RYOJI;FUKUSHIMA YOSHICHIKA;NAWATA MAKOTO;NAKAZATO NORIO;KOBAYASHI JUNICHI;HIRATSUKA YUKIYA;SATO HITOAKI
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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