发明名称 |
METHOD OF PROVIDING A METAL LAYER ON A SUBSTRATE |
摘要 |
<p>"Method of providing a metal layer on a substrate." A method of providing a metal layer on a substrate having an ultra-smooth or microprofiled surface, in which the surface structure is reproduced in the metal layer. On the substrate surface which is hydrophilic or is made hydrophilic, preferably a monomolecular layer of alkoxysilylalkylthiol, an alkoxysilylalkylamine or a chlorosilylalkylthiol is provided as a bonding intermediary in a layer which is at most 15 molecules thick by contact with an atmosphere in which said substance is present in a vapour form. The metal layer is vapour-deposited thereon in a thickness of 50-300 nm.</p> |
申请公布号 |
CA1219180(A) |
申请公布日期 |
1987.03.17 |
申请号 |
CA19830442705 |
申请日期 |
1983.12.07 |
申请人 |
N.V.PHILIPS'GLOEILAMPENFABRIEKEN |
发明人 |
PONJEE, JOHANNES J.;NELISSEN, JOHAN W.A.;VERWIJLEN, CHRISTIAAN J.A. |
分类号 |
H01L21/3205;C03C17/38;C23C14/02;C23C14/14;G02B1/10;G11B23/00;H01L21/285;H01L21/312;(IPC1-7):C23C10/02 |
主分类号 |
H01L21/3205 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|