发明名称 METHOD OF PROVIDING A METAL LAYER ON A SUBSTRATE
摘要 <p>"Method of providing a metal layer on a substrate." A method of providing a metal layer on a substrate having an ultra-smooth or microprofiled surface, in which the surface structure is reproduced in the metal layer. On the substrate surface which is hydrophilic or is made hydrophilic, preferably a monomolecular layer of alkoxysilylalkylthiol, an alkoxysilylalkylamine or a chlorosilylalkylthiol is provided as a bonding intermediary in a layer which is at most 15 molecules thick by contact with an atmosphere in which said substance is present in a vapour form. The metal layer is vapour-deposited thereon in a thickness of 50-300 nm.</p>
申请公布号 CA1219180(A) 申请公布日期 1987.03.17
申请号 CA19830442705 申请日期 1983.12.07
申请人 N.V.PHILIPS'GLOEILAMPENFABRIEKEN 发明人 PONJEE, JOHANNES J.;NELISSEN, JOHAN W.A.;VERWIJLEN, CHRISTIAAN J.A.
分类号 H01L21/3205;C03C17/38;C23C14/02;C23C14/14;G02B1/10;G11B23/00;H01L21/285;H01L21/312;(IPC1-7):C23C10/02 主分类号 H01L21/3205
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