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发明名称
CLEANING SILICON WAFER
摘要
申请公布号
JPS6260225(A)
申请公布日期
1987.03.16
申请号
JP19850200087
申请日期
1985.09.10
申请人
TOSHIBA CERAMICS CO LTD
发明人
ARAKI TAKASHI;SATO KAZUO;KINOSHITA MASAHARU
分类号
B08B3/02;H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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