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发明名称
FORMING SEMICONDUCTOR FILM
摘要
申请公布号
JPS6260217(A)
申请公布日期
1987.03.16
申请号
JP19850199986
申请日期
1985.09.09
申请人
NEC CORP
发明人
IDE YUICHI
分类号
H01L21/203;H01L21/26
主分类号
H01L21/203
代理机构
代理人
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