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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6260263(A)
申请公布日期
1987.03.16
申请号
JP19850199931
申请日期
1985.09.10
申请人
SEIKO EPSON CORP
发明人
ICHIKAWA MATSUO
分类号
H01L29/78;H01L21/265
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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