摘要 |
PURPOSE:To increase the sensitivity by adding a specified photosensistive s- triazine compound. CONSTITUTION:This photosensitive composition contains as s-triazine compound represented by formula I as a free radical forming agent. In the formula I, each of A and B is an optionally substituted aromatic residue or an optionally substituted heterocyclic aromatic residue, Y is Cl or Br and n=1, 2 or 3. When the free radical forming agent represented by the formula I undergoes the action of light in a photosensitive resist forming composition contg. a photosensitive resist forming compound, it is decomposed to discolor efficiently a coexisting discoloring agent in a moment, so a clear boundary is obtd. between exposed and unexposed parts to give a high contrast visible image. Since the free radical forming agent represented by the formula I hardly hinders the photolysis of the photosensitive resist forming compound, the photosensitivity of the photosensitive resist forming composition (the photosensitivity of the resulting resist) is hardly lowered by the free radical forming agent.
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