发明名称 |
MANUFACTURE OF SILICON ROD AND EQUIPMENT |
摘要 |
A process and apparatus for the manufacture of silicon rods having a columnar structure comprising monocrystalline crystal zones with a crystallographic preferred orientation. Molten silicon is transferred from a silicon reservoir into a crystallization chamber which is formed by rollers arranged in a leak-proof manner in the shape of the desired rod cross-section. There the silicon first forms a stable outer shell of solidified material and, while it continues to crystallize, it is withdrawn at the bottom and released by the rollers. Owing to the short period of contact with a vessel wall a silicon rod is obtained that is particularly free of impurites. |
申请公布号 |
JPS6256395(A) |
申请公布日期 |
1987.03.12 |
申请号 |
JP19860140418 |
申请日期 |
1986.06.18 |
申请人 |
WACKER CHEMITRONIC GES |
发明人 |
HORUSUTO SUTOTSUKU;ROTAARU FUUBERU;GEORUKU PURIIBUATSUSERU |
分类号 |
C30B29/06;C30B11/00;C30B15/00;C30B15/02;C30B15/08;H01L21/18;H01L21/208 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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