| 摘要 |
PURPOSE:To obtain a power source equipment which is always capable of operating stably in a optimum condition even in the case of light load, by installing a branched current sharing control circuit which performs branched current sharing support wherein both auxiliary discharge circuit and main discharge circuit are maintained in the stable control region on the occasion of minute current control in the light load operation. CONSTITUTION:A current sharing support control circuit 1d is installed, which performs the current support control as follows. When the output current iD of power source for gas laser is small, the current IDM of the first direct current power source circuit 1b is kept constant, and the current IDS of the second direct current power source circuit 1c is changed according to the output current. When the output current iD of power source for gas laser is large, the current IDS of the second direct current power source circuit 1c is kept constant, and the current IDM of the first direct current power source circuit 1b is changed according to the output current iD. For example, the reference signal IREFM of the main discharge circuit current is input into function computing device 17, and the current branching signal output from the function computing device 17 is employed s the reference signal. The deviations between the reference signal and the current feedback signals IFBKM and IFBKS detected by current detectors IMM and IMS are amplified by current control equipment I-CTR. A phase control device PHC controls an arc ignition to control direct current outputs IDM and IDS. |
