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发明名称
PHOTORESIST FOR CREATING RELIEF STRUCTURES ON HIGH-TEMPERATURE RESISTANT POLYMERS
摘要
申请公布号
DE3369742(D1)
申请公布日期
1987.03.12
申请号
DE19833369742
申请日期
1983.08.27
申请人
MERCK PATENT GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
发明人
KLUG, RUDOLF, DR.;HARTNER, HARTMUT, DR.;MERREM, HANS-JOACHIM, DR.;NEISIUS, KARL HEINZ, DR.
分类号
C08F291/18;(IPC1-7):G03C1/68
主分类号
C08F291/18
代理机构
代理人
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