| 摘要 |
PURPOSE:To enable multiple classes of Josephson junctions having various characteristics to be formed on the same plane by removing a first junction forming layer through etching except for a required portion, thereafter forming a second junction forming layer which includes a tunnel barrier layer consisting of different material or having a different thickness from the first junction forming layer, or the like. CONSTITUTION:Formed on the whole surface of a substrate 11 is a first junction forming layer 12 in which a lower electrode and a second electrode consisting of superconducting material are coupled together through a tunnel barrier layer, a first etching mask 13 is formed on a required portion thereon, and the first junction forming layer 12 which is not covered with the etching mask 13 is etched away. Thereafter, on the whole surface of the substrate 11, a second junction forming layer 14 is formed which includes a tunnel barrier layer consisting of different material or having a different thickness from the first junction forming layer 12, and the second junction forming layer 14 on the first etching mask 13 is removed via lift-off using the first etching mask 13. Then, a second etching mask 15 is formed on a required portion on the first and second junction forming layers 12, 14, and the first and second junction forming layers 12, 14 which are not covered with the second etching mask 15 are etched away. Thus, multiple classes of junction forming layers 12, 14 are formed on the same plane. |
