| 摘要 |
PURPOSE:To prevent electrostatically charged particles from entering an adjacent detector and to improve the resolution of an analyzer, etc., by providing a charged particle stopping plate which inhibits a charged particle which enters a mount part and is reflected from entering a charged particle detector. CONSTITUTION:The mount part 12 is made of metal, an insulator, etc. Further, charged particle stopping plates 13 are provided on charged particle incidence sides of respective charged particle detectors 11... or at nearly equal inclination angles to an angle theta of charged particle incidence from the amount part 12 nearby the charged particle incidence end sides. Then, a charged particle deflected by an electrostatic deflecting plate is stopped by a charged particle stopping plate 13 extending from a detector 11 at the angle theta, and consequently the charged particle reflected by the mount part 12 is deflected again by an electric field E for deflection and entering an adjacent charged particle detector 11. Thus, a radiation detector which improves the resolution of energy in a neutral particle energy analyzer, etc., is obtained.
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