| 摘要 |
PURPOSE:To detect amount of flaw of a specimen and direction thereof securely at real time, by a method wherein a detected flaw signal is corrected corresponding to variation of gap etc. and discriminated through a spade filter in classification of directions. CONSTITUTION:Flaw signal from detecting circuits 9, 10 is subjected to A/D conversion and entered in a vector arithmetic circuit 23. In the arithmetic circuit 23, signal separated in X-coordinate and Y-coordinate is converted into polar coordinates. A correction signal setting device 25 sets a filtering setting signal using gap amount. The gap amount is digitized and entered in a polar-coordinates correction arithmetic circuit 24. Signal after correction is connected by a vector filter arithmetic circuit 27 into scalar obtained by operation using gain function specified to each phase. The scalar is converted again into analog quantity by D/A converter 28 and the analog quantity is entered in a flaw discriminating circuit 29 thereby flaw discrimination is effected. |
