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发明名称
摘要
申请公布号	DE3327497(C2)	申请公布日期	1987.03.12
申请号	DE19833327497	申请日期	1983.07.29
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	TODOKORO, HIDEO, TOKIO/TOKYO, JP;FUKUHARA, SATORU, KOKUBUNJI, JP
分类号	H01J37/22;G01R31/302;H01J37/24;H01J37/26;H01J37/28;H01L21/66;(IPC1-7):H01J37/28	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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