| 发明名称 |
A METHOD OF RECOVERING COPPER FROM SPENT ETCH SOLUTIONS |
| 摘要 |
The present invention relates to a method of etching copper with a hydrogen peroxide-sulfuric acid etchant containing an acid soluble phosphonic acid in the manufacture of electronic circuits utilizing a masked copper surface and an etch solution. |
| 申请公布号 |
DE3275391(D1) |
申请公布日期 |
1987.03.12 |
| 申请号 |
DE19823275391 |
申请日期 |
1982.10.29 |
| 申请人 |
LEARONAL, INC. |
发明人 |
BRASCH, WILLIAM ROBERT |
| 分类号 |
C23F1/18;C23F1/46;C25C1/12;(IPC1-7):C23F1/18 |
主分类号 |
C23F1/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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